# Air Liquide USA LLC — Hazardous Materials Safety Interpretation

- **operation:** document
- **citation:** 13-0003
- **title:** Air Liquide USA LLC — Hazardous Materials Safety Interpretation
- **source type:** guidance
- **agency:** Pipeline and Hazardous Materials Safety Administration
- **status:** guidance
- **official:** true
- **published on:** 2013-03-08
- **effective on:** Not available
- **summary:** 13-0003 response to Air Liquide USA LLC concerning 172.202, 172.402.
- **machine formats:** - **json:** https://regulus.evalyn.ai/document/phmsa-interpretation-13-0003.json
- **markdown:** https://regulus.evalyn.ai/document/phmsa-interpretation-13-0003.md
- **app url:** https://regulus.evalyn.ai/document/phmsa-interpretation-13-0003
- **source url:** https://www.phmsa.dot.gov/sites/phmsa.dot.gov/files/docs/standards-rulemaking/hazmat/interpretations/74156/130003.pdf
**body:**

<<<PAGE 1>>>

U.S. Department of Transportation
Pipeline and Hazardous Materials
Safety Administration
1200 New Jersey Avenue, SE
Washington, DC 20590
MAR 0 8 2013
Mr. Jerry W. Freeman
Director, Transportation Compliance
Air Liquide USA LLC
2700 Post Oak Boulevard, Suite 1800
Houston, TX 77056
Reference No. 13-0003
Dear Mr. Freeman:
This is in response to your December 3, 2012 letter requesting clarification on the proper
classification and shipping description of"Trisilylamine" (CAS No. 13862-16-3) under
the Hazardous Materials Regulations (HMR; 49 CPR Parts 171-180). You state this
chemical is a liquid developed for use in the semiconductor industry. You also state the
material was tested in conformance with the hazardous material classification criteria
prescribed in the HMR and determined to meet the following four hazard classes in order
of precedence:
• Division 6.1 (poisonous), Packing Group (PG) I, Hazard Zone B;
• Division 4.3 (dangerous when wet), PG I;
• Class 8 (corrosive, dermal), PG I;
• Class 3 (flammable liquid), PG II.
You ask if the proper shipping description "UN 3491, Toxic by inhalation, liquid, water-
reactive, flammable, n.o.s. (Trisilylamine), 6.1, (4.3, 3), PGI, Zone B" is the most
appropriate selection for shipping this material throughout the United States and
internationally.
The answer is yes. However, for transport within the United States in accordance with the
HMR, § 172.402(a)(2) requires all hazardous materials with a Class 8, PG I, subsidiary
hazard to be labeled with a subsidiary CORROSIVE hazard warning label in all modes of
transport. Therefore, the subsidiary hazard class must be entered in the proper shipping
description as well (see § 172.202(a)(3)).
I hope this satisfies your request.
Sincerely,
---Y r#~~cd::----
T. Glenn Foster
Chief, Regulatory Review and Reinvention Branch
Standards and Rulemaking Division

<<<PAGE 2>>>

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December 3, 2012
Certified Return- Receipt
U.S. Department of Transportation
Standards & Rulemaking Division- East Building
Pipeline Hazardous Materials Safety Administration
Attn: Mr. Charles E. Betts (PHH-10)
1200 New Jersey Avenue, SE
Washington DC 20590-0001
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Dear Mr. Betts,
I am writing your office to request a formal letter of guidance and interpretation on the classification of Trisilylamine
(TSA) [N(SiH 3h, CAS # 13862-16-3] that is processed by Air Liquide. TSA is a chemical substance developed for
applications in the semiconductor industry, and has recent.y undergone a series of analytical and scientific tests to
determine certain characteristics. These tests were conducted by various independent and specialized certified
testing agencies over the course ofthe last several months. The results of these tests have revealed that TSA exhibits
the following characteristics as defined by the classification criteria outlined in 49 CFR Subpart D of Part 173:
• Hazard Class Division 6.1: Toxic by Inhalation (Inhalation Hazard Zone B), PG I
• :· Hazarct'C:Iass··ofvi$icifi 4.3: 'Water Reactive, PG 1
• 'Haz'ard Cic\s"s 8: Corrosive (Dermal), PG I
• l-la.zard Class 3: Flammable Liquid, PG II
Based on 49·CFR §173.2a, Precedence of Hazard Table, available and appropriate D.O.T. Basic Descriptions' found in
49 CFR §172.101 (Hazardous Materials Table), Air Liquide has selected 'UN3491, Toxic by inhalation liquid, water-
reactive, flammable n.o.s. (Trisilylamine)' for identifying TSA for shipments offered throughout the United States and
international community,
Correspondence with the US DOT Hazardous Materials Information Center and other professional and technical
leaders within our industry concur with our decision. However, this description excludes the corrosive characteristics
of TS/\. 1\,;r Liqulde 2nd its partners are seeking regulatory guidance and interpretation from your office on the proper
:::lassification of TSA based on the current regulations of Title 49 CFR (Revised as of October 1, 2012).
Air Liquide is committed to the safe and compliant transportation of hazardous materials. Should you have any
questions or require fu.rther information, please do not hesitate to contact me directly at 713.624.8213 or by email at
jerry.freeman@airliquide.com
Respectfully, ,_ , . · ·. · :0
flnr )'{~i!-"'"'"'-n
,. \. 'J:-:: -: \.; ·. ' .:· ::• ' ·.· •:
"Jerri; w: Freeman ~ ::.·•.•.•):-~ · ~· :)~'-·" ·
Director,.Tran~portation·cornpna·nce•
Air Liquide USA iLG
AIR UQUIDE USA LLC • 2700 Post Oak Boulevard, Suite 1800, Houston,TX 77056
Air Liquide (usR-<tL~x_: 46022
g_,~~mtTe5aiZC£iw~?2gte 325 Houston TX 77056
'Piion'E!: 713-624~bi:Jo ' '
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