# Entegris Inc. — Hazardous Materials Safety Interpretation

- **operation:** document
- **citation:** 22-0046
- **title:** Entegris Inc. — Hazardous Materials Safety Interpretation
- **source type:** guidance
- **agency:** Pipeline and Hazardous Materials Safety Administration
- **status:** guidance
- **official:** true
- **published on:** 2022-08-22
- **effective on:** Not available
- **summary:** 22-0046 response to Entegris Inc. concerning 173.202, 173.25.
- **machine formats:** - **json:** https://regulus.evalyn.ai/document/phmsa-interpretation-22-0046.json
- **markdown:** https://regulus.evalyn.ai/document/phmsa-interpretation-22-0046.md
- **app url:** https://regulus.evalyn.ai/document/phmsa-interpretation-22-0046
- **source url:** https://www.phmsa.dot.gov/sites/phmsa.dot.gov/files/docs/standards-rulemaking/hazmat/interpretations/76736/220046.pdf
**body:**

<<<PAGE 1>>>

1200 New Jersey Avenue, SE
Washington, DC 20590
U.S. Department
of Transportation
Pipeline and Hazardous
Materials Safety
Administration
August 22, 2022
Jim McManus
Entegris Inc.
7 Commerce Drive
Danbury, CT 06810
Reference No. 22-0046
Dear Mr. McManus:
This letter is in response to your April 21, 2022, letter requesting clarification of the Hazardous
Materials Regulations (HMR; 49 CFR Parts 171-180) applicable to shipping paper and hazard
communication requirements. You describe a package that is intended for transport by cargo
only aircraft containing a Division 4.2 hazardous material, “UN2881, Metal catalyst, dry, 4.2, PG
II,” covered under DOT Special Permit (DOT-SP) 11447 and Competent Authority Approval
(CA1995070006). You further describe the package as a gas purification system that consists of
two non-DOT specification stainless steel pressure vessels—though the contents are not under
pressure subject to the HMR—with component parts (e.g., piping), and a welded steel frame to
secure the pressure vessels. You seek clarification on how to properly describe on the shipping
paper the type of package and the quantity of material contained in the pressure vessels, and how
to properly mark and label the assembled package.
It is the shipper’s responsibility to properly classify and describe a hazardous material and
provide the required hazard communication, such as shipping paper information, in accordance
with Part 172 of the HMR, to alert emergency response personnel to the presence, form and
manner of hazardous materials offered into transportation. For instance, the HMR require the
total net mass per package and the number and type of package(s) be indicated on the shipping
paper. However, the unique circumstances of the containment device in DOT-SP 11447—i.e., a
gas purification system—makes it more difficult to describe than a standalone package (e.g., a
drum). PHMSA notes that both DOT-SP 11447 and CA1995070006 provide details about the
hazardous material, the package, and the transport requirements—and that the special permit is
required to accompany the shipment and be given to the air carrier. Finally, PHMSA also notes
that for purposes of hazard communication, the HMR require that packages placed in overpacks
have markings and labels displayed on the overpack unless otherwise visible. See
§§ 172.202(a)(6) and (7), and 173.25(a)(2), respectively.

<<<PAGE 2>>>

Given this information, it is the opinion of this Office that all three examples that you provided
regarding the description of the quantity and type of package are acceptable under the HMR.
However, the indication of “pressure vessels” when described on a shipping paper may be
misunderstood as containing contents under pressure subject to specific HMR requirements.
Further, it is acceptable to place the required marking and labeling on the exterior of the gas
purification system—such as an access panel door—with the understanding that this will be
obscured by the wooden crate overpack, thus requiring the overpack to also have the required
marking and labeling displayed.
I hope this information is helpful. Please contact us if we can be of further assistance.
Sincerely,
Dirk Der Kinderen
Chief, Standards Development Branch
Standards and Rulemaking Division

<<<PAGE 3>>>

Baker
22-0046
From: INFOCNTR (PHMSA)
To: Hazmat Interps
Subject: FW: Entegris Request for Interpretation
Date: Thursday, May 5, 2022 1:27:00 PM
Attachments: image001.png
image002.png
Entegris Request for Interpretation - DOT-SP 11447.pdf
Entegris Request for Interpretation - DOT-SP 11447-Redacted Version.pdf
See attached/below request for interpretation.
Thanks,
Jonathon, HMIC
From: Jim McManus <Jim.McManus@entegris.com>
Sent: Thursday, April 21, 2022 4:56 PM
To: INFOCNTR (PHMSA) <INFOCNTR.INFOCNTR@dot.gov>
Cc: Nicks, Michael (PHMSA) <michael.nicks@dot.gov>; Stefanie Reichel <Stefanie.Reichel@entegris.com>;
Aaron Zagala <Aaron.Zagala@Entegris.com>
Subject: Entegris Request for Interpretation
CAUTION: This email originated from outside of the Department of Transportation (DOT). Do not
click on links or open attachments unless you recognize the sender and know the content is safe.
Dear Standards and Rulemaking Division:
Pursuant to 49 CFR § 105.20, this letter is being submitted to PHMSA to request a formal letter of
interpretation in order to clarify several questions Entegris, Inc. has related to the Hazardous Materials
Regulations (HMR) and the International Civil Aviation Organization’s Technical Instructions for the Safe
Transport of Dangerous Goods by Air (ICAO TI). More specifically, the questions pertain to shipments of
packages covered under DOT-SP 11447 and Competent Authority Approval CA1995070006 by cargo only
aircraft.
As this letter includes information of a proprietary nature (e.g. trade secrets), Entegris is requesting
confidential treatment in accordance with 49 CFR § 105.30 and has provided a second copy of this letter
with the confidential information redacted.
Regards,
Jim
Jim McManus
Sr. Principal Engineer
Dangerous Goods Safety Advisor (DGSA)
M 203-482-1606
T 203-207-9307
E jim.mcmanus@entegris.com

<<<PAGE 4>>>

Entegris | PURE ADVANTAGE
7 Commerce Drive
Danbury, CT 06810 USA
CONFIDENTIALITY NOTICE: The contents of this email message and any attachments are intended solely for the addressee(s) and
may contain confidential and/or privileged information and may be legally protected from disclosure. If you are not the intended
recipient of this message or their agent, or if this message has been addressed to you in error, please immediately alert the sender
by reply email and then delete this message and any attachments. If you are not the intended recipient, you are hereby notified that
any use, dissemination, copying, or storage of this message or its attachments is strictly prohibited.
ENTEGRIS PROPRIETARY AND CONFIDENTIAL – INTERNAL

<<<PAGE 5>>>

Specialty Gas and Engineered Materials
7 Commerce Drive
Danbury, CT 06810
800.766.2681 Toll-Free
203.794.1100 Direct
www.entegris.com
April 21, 2022
Standards and Rulemaking Division
Pipeline and Hazardous Materials Safety Administration, Attn: PHH-10
U.S. Department of Transportation
East Building
1200 New Jersey Avenue, SE
Washington, DC 20590-0001
infocntr@dot.gov
Re: Request for Interpretation
Dear Standards and Rulemaking Division:
Pursuant to 49 CFR § 105.20, this letter is being submitted to PHMSA to request a formal letter of
interpretation in order to clarify several questions Entegris, Inc. has related to the Hazardous Materials
Regulations (HMR) and the International Civil Aviation Organization’s Technical Instructions for the Safe
Transport of Dangerous Goods by Air (ICAO TI). More specifically, the questions pertain to shipments of
packages covered under DOT-SP 11447 and Competent Authority Approval CA1995070006 by cargo only
aircraft.
This request is a result of discussions I have had with Mr. Michael Nicks of the General Approvals and
Permits Division, PHH-13, who advised me to submit a formal request for interpretation to address the
questions Entegris has raised.
As this letter includes information of a proprietary nature (e.g. trade secrets), Entegris is requesting
confidential treatment in accordance with 49 CFR § 105.30 and has provided a second copy of this letter
with the confidential information redacted.
Background
DOT-SP 11447 is a special permit granted to Entegris, Inc. (formerly Saes Pure Gas, Inc.) which authorizes
the transport in commerce of a “Gas Purification System” containing certain Division 4.1 (flammable
solids) and 4.2 (spontaneously combustible solids) materials in non-DOT specification stainless steel
pressure vessels.
DOT-SP 11447 authorizes several exemptions from the HMR as described in Section 4 of the special
permit, and are summarized as follows:
• non-DOT specification stainless steel pressure vessels are authorized as a packaging.
• The maximum quantities for UN 2881, PG II and UN 3089, PG II listed in column 9B of the
Hazardous Materials Table may be exceeded.
• The materials are not subject to the “away from” segregation requirement in § 176.83 for the
storage of Division 4.1 and 4.2 materials in the same cargo hold.
CA1995070006 is a United States Competent Authority Approval granted to Entegris, Inc. This approval
serves as an “exemption” as defined in Part 1, paragraph 3.1.1 of the ICAO TI and in Chapter 7.9, Section
7.9.2 of the IMDG Code and as a “Competent Authority Approval” as defined in 49 CFR § 107.1.
CA1995070006 is used in conjunction with DOT-SP 11447 for international shipments by air and vessel.
CA1995070006 waives several requirements of the ICAO TI and IMDG Code when offering for

<<<PAGE 6>>>

transportation in commerce certain Division 4.1 and Division 4.2 solids in non-DOT specification stainless
steel pressure vessels that conform to the requirements of DOT-SP 11447.
This request for interpretation seeks to clarify how the quantity and type of packaging should be
described on the shipping paper when transporting the DOT-SP 11447 packages by cargo only aircraft.
The requirements for the description of the quantity and type of packaging on the shipping paper are
specified in 49 CFR § 172.202 and ICAO TI 4.1.5.
How should the packaging specified in DOT-SP 11447 be described on the shipping paper?
Entegris has received several differing interpretations on how the DOT-SP 11447 packaging should be
described on the shipping paper. The packaging description should align with the regulatory definitions
of packaging:
Regulatory Definitions for Packaging:
49 CFR § 171.8 defines Packaging as follows:
“means a receptacle and any other components or materials necessary for the receptacle to perform
its containment function in conformance with the minimum packing requirements of this
subchapter.”
The ICAO TI defines Packaging as follows:
“One or more receptacles and any other components or materials necessary for the receptacles to
perform their containment and other safety functions.”
Packaging Specified in DOT-SP 11447 and CA1995070006:
DOT-SP 11447 states the detailed packaging requirements in paragraph 7.a. for the Division 4.2 material
and paragraph 7.b. for the Division 4.1 material. The following is the packaging description given in DOT-
SP 11447 for the Division 4.2 material:
CA1995070006 describes the prescribed packaging in paragraph 5.b. as follows:
Page 2

<<<PAGE 7>>>

Example DOT-SP 11447 Package for Division 4.2 Material:
The questions Entegris has are based on the following DOT-SP 11447 package:
Note: See Annex 1 & 2, which include drawings and pictures of the example DOT-SP 11447 package.
The example DOT-SP 11447 package is a “Gas Purification System” with the packaging being that
described in paragraph 7.a. of DOT-SP 11447, containing 60 Kg of UN 2881 − Metal catalyst, dry − PG II,
equally divided by mass in two (2) non-DOT specification stainless steel pressure vessels under a nitrogen
blanket not exceeding 25 psig, and with the pressure vessels and associated components arranged and
securely affixed within a welded steel frame as shown in drawings on file with OHMSAPD. The pressure
vessels are designed, constructed and tested in accordance with Section VIII of the ASME Boiler and
Pressure Vessel Code. The maximum allowable working pressure of the pressure vessels is not less than
225 psig at 250 °C.
This entire “Gas Purification System” is encapsulated inside several bags, including a non-transparent
moisture barrier bag (e.g. Mylar) and then further packed in a strong wooden crate to protect the “Gas
Purification System” from environmental and cosmetic damage during shipment and to form one handling
unit for convenience of handling and storage. This wooden crate is not specified as a requirement in the
special permit. Entegris considers this wooden crate to be an overpack for the packaging described in
paragraph 7.a. of the special permit.
For the above DOT-SP 11447 example package, Entegris has received several interpretations from other
expert parties as to how the packaging should be described on the shipping paper. The interpretations
are as follows:
• Interpretation 1: The packaging is two (2) non-DOT specification stainless steel pressure vessels.
An aircraft operator has suggested this description, using the term “cylinder” to describe the
pressure vessels, as cylinders is listed as a single packaging in packing instruction 473. This
interpretation may be based on the packaging description given in CA1995070006, which states
the packagings are non-DOT specification stainless steel pressure vessels.
• Interpretation 2: The packaging is all materials and components listed in paragraph 7.a. of DOT-
SP 11447, including; the non-DOT specification stainless steel pressure vessels under a nitrogen
blanket not exceeding 25 psig, with the pressure vessels and associated components arranged
and securely affixed within a welded steel frame. (This description adds significant complexity to
the shipping paper description and may cause shipment delays)
Since conflicting interpretations have been provided by several experts, Entegris requests PHMSA to
clarify which items listed in paragraph 7.a. constitutes the packaging and how the quantity and type of
packaging should be described on the shipping paper when shipped by air.
Marking and Labelling Questions:
Additionally, there is a concern as to where the marking and labels required by the HMR and the ICAO TI
should be placed.
The HMR states that markings must be printed on or affixed to the surface of a package or on a label, tag,
or sign and § 172.406 states labels must be printed on or affixed to the surface of a package or on a label,
tag, or sign. The ICAO TI has similar requirements for the location of marks and labels.
Annex 2 shows pictures of the example purification system. After the system is fully assembled, the
pressure vessels are not visible as they are covered with heating jackets and are also obscured by the
metal doors affixed to the welded steel frame.
From a practical standpoint it seems the best location for the marks and labels would be on an external
surface of the gas purification system, such as the front doors as shown in the example in Annex 2.
Page 3

<<<PAGE 8>>>

Questions:
1. For the example DOT-SP 11447 package, which of the following components comprise the
packaging?
a. two (2) non-DOT specification stainless steel pressure vessels
b. Nitrogen blanket not exceeding 25 psig
c. Associated components (e.g. piping, valves and fittings)
d. Welded steel frame
2. Assuming Interpretation 1 is correct and only the two (2) non-DOT specification stainless steel
pressure vessels comprise the packaging, is the following description (highlighted in yellow) of
the quantity and type of packaging acceptable for shipment by air?
3. Assuming Interpretation 1 is correct, where should the labels and marks required by Part 172
subpart F and E be affixed?
Note: Due to the design of the gas purification system, the surface of the pressure vessels are not
visible as they are covered with heating jackets which cannot be removed for transport. Entegris
suggests the marks be placed as shown in the picture in Annex 2.
4. Assuming Interpretation 2 is correct and all 4 items listed in Question 1 comprise the packaging,
which of the following descriptions of the quantity and type of packaging are acceptable:
Interpretation 2 − Description for quantity and type of packaging − Option 1
Interpretation 2 − Description for quantity and type of packaging − Option 2
Page 4

<<<PAGE 9>>>

If both of the above options are incorrect, Entegris would appreciate PHMSA’s guidance on what the
appropriate description of the quantity and type of packaging is.
5. Assuming Interpretation 2 is correct, where should the labels and marks required by Part 172
subpart F and E be affixed? (Refer to Annex 2 for pictures showing different locations labels and
marks can be affixed to)
Entegris greatly appreciates PHMSA’s attention to this matter and looks forward to a response that further
clarifies our understanding of the Hazardous Materials Regulations.
Should PHMSA require additional information to process the interpretation, please contact me at your
convenience.
Sincerely,
James (Jim) V. McManus
Sr. Principal Engineer
Dangerous Goods Safety Advisor (DGSA)
Entegris Inc.
Mobile Phone: 203-482-1606
Page 5

<<<PAGE 10>>>

This page includes confidential information
Annex 1
Drawing for Example Gas Purification System
Page 6

<<<PAGE 11>>>

This page includes confidential information
Annex 2
Pictures of Gas Purification System
Page 7

<<<PAGE 12>>>

Specialty Gas and Engineered Materials
7 Commerce Drive
Danbury, CT 06810
800.766.2681 Toll-Free
203.794.1100 Direct
www.entegris.com
April 21, 2022
Standards and Rulemaking Division
Pipeline and Hazardous Materials Safety Administration, Attn: PHH-10
U.S. Department of Transportation
East Building
1200 New Jersey Avenue, SE
Washington, DC 20590-0001
infocntr@dot.gov
Re: Request for Interpretation
Dear Standards and Rulemaking Division:
Pursuant to 49 CFR § 105.20, this letter is being submitted to PHMSA to request a formal letter of
interpretation in order to clarify several questions Entegris, Inc. has related to the Hazardous Materials
Regulations (HMR) and the International Civil Aviation Organization’s Technical Instructions for the Safe
Transport of Dangerous Goods by Air (ICAO TI). More specifically, the questions pertain to shipments of
packages covered under DOT-SP 11447 and Competent Authority Approval CA1995070006 by cargo only
aircraft.
This request is a result of discussions I have had with Mr. Michael Nicks of the General Approvals and
Permits Division, PHH-13, who advised me to submit a formal request for interpretation to address the
questions Entegris has raised.
As this letter includes information of a proprietary nature (e.g. trade secrets), Entegris is requesting
confidential treatment in accordance with 49 CFR § 105.30 and has provided a second copy of this letter
with the confidential information redacted.
Background
DOT-SP 11447 is a special permit granted to Entegris, Inc. (formerly Saes Pure Gas, Inc.) which authorizes
the transport in commerce of a “Gas Purification System” containing certain Division 4.1 (flammable
solids) and 4.2 (spontaneously combustible solids) materials in non-DOT specification stainless steel
pressure vessels.
DOT-SP 11447 authorizes several exemptions from the HMR as described in Section 4 of the special
permit, and are summarized as follows:
• non-DOT specification stainless steel pressure vessels are authorized as a packaging.
• The maximum quantities for UN 2881, PG II and UN 3089, PG II listed in column 9B of the
Hazardous Materials Table may be exceeded.
• The materials are not subject to the “away from” segregation requirement in § 176.83 for the
storage of Division 4.1 and 4.2 materials in the same cargo hold.
CA1995070006 is a United States Competent Authority Approval granted to Entegris, Inc. This approval
serves as an “exemption” as defined in Part 1, paragraph 3.1.1 of the ICAO TI and in Chapter 7.9, Section
7.9.2 of the IMDG Code and as a “Competent Authority Approval” as defined in 49 CFR § 107.1.
CA1995070006 is used in conjunction with DOT-SP 11447 for international shipments by air and vessel.
CA1995070006 waives several requirements of the ICAO TI and IMDG Code when offering for

<<<PAGE 13>>>

transportation in commerce certain Division 4.1 and Division 4.2 solids in non-DOT specification stainless
steel pressure vessels that conform to the requirements of DOT-SP 11447.
This request for interpretation seeks to clarify how the quantity and type of packaging should be
described on the shipping paper when transporting the DOT-SP 11447 packages by cargo only aircraft.
The requirements for the description of the quantity and type of packaging on the shipping paper are
specified in 49 CFR § 172.202 and ICAO TI 4.1.5.
How should the packaging specified in DOT-SP 11447 be described on the shipping paper?
Entegris has received several differing interpretations on how the DOT-SP 11447 packaging should be
described on the shipping paper. The packaging description should align with the regulatory definitions
of packaging:
Regulatory Definitions for Packaging:
49 CFR § 171.8 defines Packaging as follows:
“means a receptacle and any other components or materials necessary for the receptacle to perform
its containment function in conformance with the minimum packing requirements of this
subchapter.”
The ICAO TI defines Packaging as follows:
“One or more receptacles and any other components or materials necessary for the receptacles to
perform their containment and other safety functions.”
Packaging Specified in DOT-SP 11447 and CA1995070006:
DOT-SP 11447 states the detailed packaging requirements in paragraph 7.a. for the Division 4.2 material
and paragraph 7.b. for the Division 4.1 material. The following is the packaging description given in DOT-
SP 11447 for the Division 4.2 material:
CA1995070006 describes the prescribed packaging in paragraph 5.b. as follows:
Page 2

<<<PAGE 14>>>

Example DOT-SP 11447 Package for Division 4.2 Material:
The questions Entegris has are based on the following DOT-SP 11447 package:
Note: See Annex 1 & 2, which include drawings and pictures of the example DOT-SP 11447 package.
The example DOT-SP 11447 package is a “Gas Purification System” with the packaging being that
described in paragraph 7.a. of DOT-SP 11447, containing 60 Kg of UN 2881 − Metal catalyst, dry − PG II,
equally divided by mass in two (2) non-DOT specification stainless steel pressure vessels under a nitrogen
blanket not exceeding 25 psig, and with the pressure vessels and associated components arranged and
securely affixed within a welded steel frame as shown in drawings on file with OHMSAPD. The pressure
vessels are designed, constructed and tested in accordance with Section VIII of the ASME Boiler and
Pressure Vessel Code. The maximum allowable working pressure of the pressure vessels is not less than
225 psig at 250 °C.
This entire “Gas Purification System” is encapsulated inside several bags, including a non-transparent
moisture barrier bag (e.g. Mylar) and then further packed in a strong wooden crate to protect the “Gas
Purification System” from environmental and cosmetic damage during shipment and to form one handling
unit for convenience of handling and storage. This wooden crate is not specified as a requirement in the
special permit. Entegris considers this wooden crate to be an overpack for the packaging described in
paragraph 7.a. of the special permit.
For the above DOT-SP 11447 example package, Entegris has received several interpretations from other
expert parties as to how the packaging should be described on the shipping paper. The interpretations
are as follows:
• Interpretation 1: The packaging is two (2) non-DOT specification stainless steel pressure vessels.
An aircraft operator has suggested this description, using the term “cylinder” to describe the
pressure vessels, as cylinders is listed as a single packaging in packing instruction 473. This
interpretation may be based on the packaging description given in CA1995070006, which states
the packagings are non-DOT specification stainless steel pressure vessels.
• Interpretation 2: The packaging is all materials and components listed in paragraph 7.a. of DOT-
SP 11447, including; the non-DOT specification stainless steel pressure vessels under a nitrogen
blanket not exceeding 25 psig, with the pressure vessels and associated components arranged
and securely affixed within a welded steel frame. (This description adds significant complexity to
the shipping paper description and may cause shipment delays)
Since conflicting interpretations have been provided by several experts, Entegris requests PHMSA to
clarify which items listed in paragraph 7.a. constitutes the packaging and how the quantity and type of
packaging should be described on the shipping paper when shipped by air.
Marking and Labelling Questions:
Additionally, there is a concern as to where the marking and labels required by the HMR and the ICAO TI
should be placed.
The HMR states that markings must be printed on or affixed to the surface of a package or on a label, tag,
or sign and § 172.406 states labels must be printed on or affixed to the surface of a package or on a label,
tag, or sign. The ICAO TI has similar requirements for the location of marks and labels.
Annex 2 shows pictures of the example purification system. After the system is fully assembled, the
pressure vessels are not visible as they are covered with heating jackets and are also obscured by the
metal doors affixed to the welded steel frame.
From a practical standpoint it seems the best location for the marks and labels would be on an external
surface of the gas purification system, such as the front doors as shown in the example in Annex 2.
Page 3

<<<PAGE 15>>>

Questions:
1. For the example DOT-SP 11447 package, which of the following components comprise the
packaging?
a. two (2) non-DOT specification stainless steel pressure vessels
b. Nitrogen blanket not exceeding 25 psig
c. Associated components (e.g. piping, valves and fittings)
d. Welded steel frame
2. Assuming Interpretation 1 is correct and only the two (2) non-DOT specification stainless steel
pressure vessels comprise the packaging, is the following description (highlighted in yellow) of
the quantity and type of packaging acceptable for shipment by air?
3. Assuming Interpretation 1 is correct, where should the labels and marks required by Part 172
subpart F and E be affixed?
Note: Due to the design of the gas purification system, the surface of the pressure vessels are not
visible as they are covered with heating jackets which cannot be removed for transport. Entegris
suggests the marks be placed as shown in the picture in Annex 2.
4. Assuming Interpretation 2 is correct and all 4 items listed in Question 1 comprise the packaging,
which of the following descriptions of the quantity and type of packaging are acceptable:
Interpretation 2 − Description for quantity and type of packaging − Option 1
Interpretation 2 − Description for quantity and type of packaging − Option 2
Page 4

<<<PAGE 16>>>

If both of the above options are incorrect, Entegris would appreciate PHMSA’s guidance on what the
appropriate description of the quantity and type of packaging is.
5. Assuming Interpretation 2 is correct, where should the labels and marks required by Part 172
subpart F and E be affixed? (Refer to Annex 2 for pictures showing different locations labels and
marks can be affixed to)
Entegris greatly appreciates PHMSA’s attention to this matter and looks forward to a response that further
clarifies our understanding of the Hazardous Materials Regulations.
Should PHMSA require additional information to process the interpretation, please contact me at your
convenience.
Sincerely,
James (Jim) V. McManus
Sr. Principal Engineer
Dangerous Goods Safety Advisor (DGSA)
Entegris Inc.
Mobile Phone: 203-482-1606
Page 5

<<<PAGE 17>>>

This page includes confidential information
Annex 1
Drawing for Example Gas Purification System
Page 6

<<<PAGE 18>>>

This page includes confidential information
Annex 2
Pictures of Gas Purification System
Page 7
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